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Entegris Wins Bid for KA200 Peek Wafer Carriers

  • Wednesday, 30th August 2000
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Entegris, Inc., a materials integrity management company, announced that it has won a competitive bid for its KA200 wafer carriers from Silterra Malaysia Sdn. Bhd. Silterra will use these carriers in its 200 mm standard mechanical interface (SMIF) fab, the first of several such semiconductor fabs in Kulim, Malaysia, planned by the company to manufacture logic integrated circuits (ICs) with design rules of 0.25 micron, 0.18 micron and smaller. Installation is scheduled to begin this fall. Composed of STAT-PRO(R) 3000-a static, dissipative blend of PEEK and carbon fiber-the KA200 is configured with embedded radio frequency (RF) tags for optimum wafer carrier identification and tracking in the fab.


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